This standard proposes guidelines for the detection and control of air chemical pollution control in clean rooms and related controlled environments. This standard applies to the control of air chemical pollution in clean rooms and related controlled environments such as microelectronics, optoelectronics factories, production and research with special needs. This standard does not apply to nuclear energy and military applications.
GB/T 36306-2018 Referenced Document
GB/T 25915.8-2010 Cleanrooms and associated controlled environments.Part 8:Classification of airborne molecular contamination
GB/T 36306-2018 history
2024GB/T 36306-2024 Clean rooms and related controlled environments Technical requirements for air chemical pollution control
2018GB/T 36306-2018 Cleanrooms and associated controlled environments.Guidelines for airborne chemical contamination control