DIN 50989-1:2018
Ellipsometry - Part 1: Principles; Text in German and English

Standard No.

DIN 50989-1:2018

Release Date

2018

Published By

German Institute for Standardization

Latest

DIN 50989-1:2018

Replace

DIN 50989-1:2017

Scope

This standard deals with the ellipsometry, a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses, in the range of at-line production control, quality assurance and material development.

DIN 50989-1:2018 Referenced Document

• DIN EN ISO/IEC 17025:2005 General requirements for the competence of testing and calibration laboratories (ISO/IEC 17025:2005); German and English version EN ISO/IEC 17025:2005
• ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)

DIN 50989-1:2018 history

• 2018 DIN 50989-1:2018 Ellipsometry - Part 1: Principles; Text in German and English
• 1970 DIN 50989-1 E:2017-04 Ellipsometry - Part 1: Principles
• 2017 DIN 50989-1 E:2017 Draft Document - Ellipsometry - Part 1: Principles; Text in German and English