JIS C 5630-26:2017
Semiconductor devices -- Micro-electromechanical devices -- Part 26: Description and measurement methods for micro trench and needle structures

Standard No.

JIS C 5630-26:2017

Release Date

2017

Published By

Japanese Industrial Standards Committee (JISC)

Latest

JIS C 5630-26:2017

JIS C 5630-26:2017 history

• 2017 JIS C 5630-26:2017 Semiconductor devices -- Micro-electromechanical devices -- Part 26: Description and measurement methods for micro trench and needle structures