BS EN 62047-26:2016
Semiconductor devices. Micro-electromechanical devices. Description and measurement methods for micro trench and needle structures
- Standard No.
- BS EN 62047-26:2016
- Release Date
- 2016
- Published By
- British Standards Institution (BSI)
- Latest
- BS EN 62047-26:2016
BS EN 62047-26:2016 Referenced Document
- EN ISO 3274:1997 Geometrical Product Specifications (GPS) - Surface Texture: Profile Method - Nominal Characteristics of Contact (Stylus) Instruments
- ISO 129-1 Technical product documentation (TPD) — Presentation of dimensions and tolerances — Part 1: General principles — Amendment 1*， 2020-03-09 Update
- ISO 3274:1996 Geometrical Product Specifications (GPS) - Surface texture: Profile method - Nominal characteristics of contact (stylus) instruments
- ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)
BS EN 62047-26:2016 history
- 2016 BS EN 62047-26:2016 Semiconductor devices. Micro-electromechanical devices. Description and measurement methods for micro trench and needle structures
