General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Latest
GB/T 32293-2015
Scope
This standard specifies personnel qualification requirements, general requirements, safety requirements for leak detection implementation, selection procedures and selection principles, and characteristic parameters of leak detection methods for the selection of vacuum equipment leak detection methods. This standard applies to the selection of leak detection methods for vacuum equipment. Applicable vacuum equipment includes vacuum containers, vacuum pipes, vacuum pumps, vacuum valves, vacuum coating equipment, vacuum drying equipment, vacuum freeze drying equipment, surface analysis equipment, vacuum metallurgical equipment, space Environmental simulation equipment, semiconductor production equipment and other vacuum equipment. The selection of leak detection methods for other equipment involving vacuum state during work can also refer to this standard.