GB/T 32277-2015
Instrumental neutron activation analysis test method for silicon (English Version)

Standard No.

GB/T 32277-2015

Language

Chinese, Available in English version

Release Date

2017

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 32277-2015

Scope

1.1 This standard specifies the instrumental neutron activation analysis test method for silicon materials. 1.2 "This standard is applicable to instrumental neutron activation analysis of silicon materials produced by chemical vapor deposition or metallurgical purification methods. Analysis samples can be mono-silicon or polycrystalline silicon, and the form of polycrystalline silicon can be powder, granule, block or silicon wafer 1.3 "This standard applies to the macroscopic composition analysis of materials. If additional sample preparation is performed according to this test method, and surface contamination is avoided during sample extraction, transfer, and preparation, analysis of the surface or near-surface area of the sample can also be achieved. 1.4 This test method is only applicable to the thermal neutron or epithermal neutron activation analysis of the trace elements listed in Appendix A. 1.5 This test method is not applicable to the analysis of amorphous silicon thin film, polycrystalline silicon thin film or microcrystalline silicon thin film. Silicon samples artificially doped with high concentrations of special elements do not belong to the scope of application of this test method, but after checking the impact of doping on safety, detection limit and minimum waiting time tw, this test method may still be applicable. 1.6 This test method is intended for the analysis of a wide range of trace elements (see Appendix A). Generally, the irradiation time of the sample should be longer than the training life of "Si", and the analysis should be carried out after the "Si" generated by re-irradiation has decayed sufficiently.

GB/T 32277-2015 Referenced Document

• GB 18871 Basic standards for protection against ionizing radiation and for the safety of radiation sources
• GB/T 14264 Semiconductor materials-Terms and definitions
• GB/T 620 Chemical reagent—Hydrofluoric acid
• GB/T 626 Chemical reagent Nitric acid
• GJB 2253 Guidelines for safe use of nitrogen and liquid nitrogen
• ISO 11929:2010 Determination of the characteristic limits (decision threshold, detection limit and limits of the confidence interval) for measurements of ionizing radiation - Fundamentals and application

GB/T 32277-2015 history

• 2017 GB/T 32277-2015 Instrumental neutron activation analysis test method for silicon