GB/T 32188-2015
Test method for full width at half maximum of double crystal X-ray rocking curve of GaN single crystal substrate (English Version)

Standard No.

GB/T 32188-2015

Language

Chinese, Available in English version

Release Date

2015

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 32188-2015

Scope

This standard specifies the method for measuring the FWHM of the rocking curve of a gallium nitride single crystal substrate by using a double crystal X-ray diffractometer. This standard applies to gallium nitride single crystal substrates grown by chemical vapor deposition and other methods.

GB/T 32188-2015 Referenced Document

• GB/T 14264 Semiconductor materials-Terms and definitions

GB/T 32188-2015 history

• 2015 GB/T 32188-2015 Test method for full width at half maximum of double crystal X-ray rocking curve of GaN single crystal substrate