This standard specifies the terminology, properties, technical requirements, test methods, inspection rules and packaging, marking, storage, transportation, etc. of positive film developers for integrated circuits. This standard applies to positive resist developers for integrated circuits, hereinafter referred to as positive resist developers. This standard does not address safety issues. The user of this standard is responsible for establishing appropriate safety and health provisions and limitations of use.
SJ/T 11508-2015 history
2015SJ/T 11508-2015 Positive Photoresist developer for Integrated Circuit