This standard specifies the terminology, properties, technical requirements, test methods, inspection rules and packaging, marking, storage, transportation, etc. of oxide layer buffer corrosion solutions for integrated circuits. This standard applies to oxide layer buffer etching solutions for integrated circuits. This standard does not address safety issues. The user of this standard is responsible for establishing appropriate safety and health provisions and limitations of use.
SJ/T 11507-2015 history
2015SJ/T 11507-2015 Oxide coating etching buffer for integrated circuit