SJ/T 11491-2015
Test methods for measurement of interstitial oxygen content in silicon by short baseline infrared absorption spectrometry (English Version)
- Standard No.
- SJ/T 11491-2015
- Language
- Chinese, Available in English version
- Release Date
- 2015
- Published By
- Professional Standard - Electron
- Latest
- SJ/T 11491-2015
- Scope
- This standard specifies the determination of interstitial oxygen content in silicon using short baseline infrared spectroscopy. This standard is suitable for measuring the interstitial oxygen content in n-type silicon single crystals and p-type silicon single crystals with low resistivity using short baseline infrared absorption method at room temperature. A test that measures the oxygen content in the effective range from 1 × 10 at · cm to the maximum solid solubility of interstitial oxygen in silicon single crystals.
SJ/T 11491-2015 history
- 2015 SJ/T 11491-2015 Test methods for measurement of interstitial oxygen content in silicon by short baseline infrared absorption spectrometry
