KS A 0083-2013
Mass spectrometer(type leak) detector general rules for calibration system

Standard No.

KS A 0083-2013

Release Date

2013

Published By

Korean Agency for Technology and Standards (KATS)

Status

Be replaced

Replace By

KS A 0083-2013(2018)

Latest

KS A 0083-2023

Replace

KS A 0083-2002

Scope

This standard specifies the calibration method for mass spectrometer-type leak detectors (hereinafter referred to as leak detectors) that use a mass spectrometer as a detector and have a built-in vacuum exhaust system to maintain the analyzer tube in an operable vacuum state. However, This method is mainly applied to using helium 4. It also applies to using other gases.

KS A 0083-2013 history

• 2023 KS A 0083-2023 Mass spectrometer(type leak) detector general rules for calibration system
• 0000 KS A 0083-2013(2018)
• 2013 KS A 0083-2013 Mass spectrometer(type leak) detector general rules for calibration system
• 2002 KS A 0083-2002 Mass-spectrometer-type leak-detector calibration
• 0000 KS A 0083-1989