KS C 6521-2008
Method of evaluation for coating components of semiconductor and LCD process

Standard No.

KS C 6521-2008

Release Date

2008

Published By

Korean Agency for Technology and Standards (KATS)

Status

Be replaced

Replace By

KS C 6521-2019

Latest

KS C 6521-2021

Scope

This standard covers etching during semiconductor/LCD processing or coating inside chemical vapor deposition (CVD) process equipment.

KS C 6521-2008 history

• 2021 KS C 6521-2021 Method of evaluation for coating components of semiconductor and LCD process
• 2019 KS C 6521-2019 Method of evaluation for coating components of semiconductor and LCD process
• 2008 KS C 6521-2008 Method of evaluation for coating components of semiconductor and LCD process