KS B 7068-2002
Test code for accuracy of X-Y table for control position

Standard No.

KS B 7068-2002

Release Date

2002

Published By

Korean Agency for Technology and Standards (KATS)

Status

Withdraw

Replace By

KS B 7068-2002(2017)

Latest

KS B 7068-2002(2022)

Scope

This standard specifies the transfer distance in the X and Y directions among positioning equipment such as semiconductor equipment and industrial equipment.

KS B 7068-2002 history

• 0000 KS B 7068-2002(2022)
• 0000 KS B 7068-2002(2017)
• 2002 KS B 7068-2002 Test code for accuracy of X-Y table for control position