GB/T 30654-2014
Test method for lattice constant of Ⅲ-nitride epitaxial layers (English Version)

Standard No.

GB/T 30654-2014

Language

Chinese, Available in English version

Release Date

2014

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 30654-2014

Scope

This standard specifies the method for testing the lattice constant of III-nitride epitaxial wafers by high-resolution X-ray diffraction. This standard applies to nitrides (Ga, In, etc.) grown on oxide substrates (Al₂O₃, ZnO, etc.) , A1) Measurement of the lattice constant of N monolayer or multilayer heteroepitaxial wafers. The measurement of lattice constants of other heterogeneous epitaxial wafers can also refer to this standard.

GB/T 30654-2014 history

• 2014 GB/T 30654-2014 Test method for lattice constant of Ⅲ-nitride epitaxial layers