KS C IEC 60204-33:2010
Safety guideline for semiconductor fabrication equipment

Standard No.

KS C IEC 60204-33:2010

Release Date

2010

Published By

Korean Agency for Technology and Standards (KATS)

Status

Be replaced 2020-01

Replace By

KS C IEC 60204-33-2020

Latest

KS C IEC 60204-33-2020

Scope

This standard covers technologies related to semiconductor manufacturing equipment for manufacturing (processing), measurement, assembly, and testing of semiconductors.

KS C IEC 60204-33:2010 history

• 2020 KS C IEC 60204-33-2020 Safety guideline for semiconductor fabrication equipment
• 2010 KS C IEC 60204-33:2010 Safety guideline for semiconductor fabrication equipment