EN ISO 25178-603:2013
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phaseshifting interferometric microscopy) instruments

Standard No.

EN ISO 25178-603:2013

Release Date

2013

Published By

European Committee for Standardization (CEN)

Latest

EN ISO 25178-603:2013

Replace

FprEN ISO 25178-603:2013

Scope

This part of ISO 25178 specifies the metrological properties of phase-shifting interferometric (PSI) microscopy measuring instruments for measuring surface profiles and for surface measurement of surface properties.

EN ISO 25178-603:2013 history

• 2013 EN ISO 25178-603:2013 Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phaseshifting interferometric microscopy) instruments
• 2009 EN ISO 25178-603:2009 Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments