KS D ISO 14237:2003
Surface chemical analysis－Secondary-ion mass spectrometry－Determination of boron atomic concentration in silicon using uniformly doped materials

Standard No.

KS D ISO 14237:2003

Release Date

2003

Published By

Korean Agency for Technology and Standards (KATS)

Status

Be replaced

Replace By

KS D ISO 14237-2003(2018)

Latest

KS D ISO 14237-2023

Replace

KS D ISO 14237:2002

Scope

This standard specifies that boron is uniformly added and calibrated by a certified standard material in which boron is ion-implanted.

KS D ISO 14237:2003 history

• 2023 KS D ISO 14237-2023
• 0000 KS D ISO 14237-2003(2018)
• 2003 KS D ISO 14237:2003 Surface chemical analysis－Secondary-ion mass spectrometry－Determination of boron atomic concentration in silicon using uniformly doped materials
• 0000 KS D ISO 14237:2002