ISO 25178-603:2013
Geometrical product specifications (GPS).Surface texture: Areal.Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
- Standard No.
- ISO 25178-603:2013
- Release Date
- 2013
- Published By
- International Organization for Standardization (ISO)
- Latest
- ISO 25178-603:2013
- Scope
- This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
ISO 25178-603:2013 history
- 2013 ISO 25178-603:2013 Geometrical product specifications (GPS).Surface texture: Areal.Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
