IEC 62276:2012 applies to the manufacture of synthetic quartz, lithium niobate (LN), lithium tantalate (LT), lithium tetraborate (LBO), and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface
DS/EN 62276:2013 history
2013DS/EN 62276:2013 Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods