ISO 25178-604:2013
Geometrical product specifications (GPS).Surface texture: Areal.Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments

Standard No.

ISO 25178-604:2013

Release Date

2013

Published By

International Organization for Standardization (ISO)

Latest

ISO 25178-604:2013

Scope

This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

ISO 25178-604:2013 history

• 2013 ISO 25178-604:2013 Geometrical product specifications (GPS).Surface texture: Areal.Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments