DIN EN 62276:2013 Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods (IEC 62276:2012); German version EN 62276:2013
2017DIN EN 62276:2017-08 Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods (IEC 62276:2016); German version EN 62276:2016 / Note: DIN EN 62276 (2013-08) remains valid alongside this standard until 2019-11-28.
2013DIN EN 62276:2013 Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods (IEC 62276:2012); German version EN 62276:2013