DS/EN ISO 14644-10:2013
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration

Standard No.

DS/EN ISO 14644-10:2013

Release Date

2013

Published By

Danish Standards Foundation

Latest

DS/EN ISO 14644-10:2013

Scope

ISO 14644-10:2012 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). It is applicable to all solid surfaces in cleanro

DS/EN ISO 14644-10:2013 history

• 2013 DS/EN ISO 14644-10:2013 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration