VDI 2083 Blatt 17-2013 PDF

Scope: The guideline deals with particulate and chemical (molecular) contaminations and electrostatic characteristics of materials and the cleanability of surfaces. Biological and radiological contaminations are not a specific subject of this guideline. The guideline defines the cleanliness compatibility and cleanroom compatiblity for materials. Based on this, a classification is made, and procedures are specified for determining the suitability for the intended use in clean production areas.

VDI 2083 Blatt 17-2013 Referenced Document

DIN 50452-1:1995 Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 1: Microscopic determination of particles
DIN 53804-2:1985 Stastistical interpretation of data; countable (discrete) characteristics
DIN 55301:1978 Presentation of statistical tables
DIN EN 1335-1:2002 Office furniture - Office work chair - Part 1: Dimensions; Determination of dimensions; German version EN 1335-1:2000
DIN EN 1335-2:2010 Office furniture - Office work chair - Part 2: Safety requirements; German version EN 1335-2:2009
DIN EN 1335-3:2009 Office furniture - Office work chair - Part 3: Test methods; English version of DIN EN 1335-3:2009-08
DIN EN 13779:2007 Ventilation for non-residential buildings - Performance requirements for ventilation and room-conditioning systems English version EN 13779:2007-09
DIN EN 14041:2008 Resilient, textile and laminate floor coverings - Essential characteristics(includes Corrigenda AC:2005+AC:2006); English version of DIN EN 14041:2008-05
DIN EN 1815:1998 Resilient and textile floor coverings - Assessment of static electrical propensity; German version EN 1815:1997
DIN EN 61340-5-1:2008 Electrostatics - Part 5-1: Protection of electronic devices from electrostatic phenomena - General requirements (IEC 61340-5-1:2007); German version EN 61340-5-1:2007

2013 VDI 2083 Blatt 17-2013 Cleanroom technology - Compatibility of materials with the required cleanliness
2011 VDI 2083 Blatt 17-2011 Cleanroom technology - Compatibility of materials with required cleanliness class and surface cleanliness