ISO 16413:2013
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
- Standard No.
- ISO 16413:2013
- Release Date
- 2013
- Published By
- International Organization for Standardization (ISO)
- Status
- Replace By
- ISO 16413:2020
- Latest
- ISO 16413:2020
ISO 16413:2013 history
- 2020 ISO 16413:2020 Evaluation of thickness, density and interface width of thin films by X-ray reflectometry — Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
- 2013 ISO 16413:2013 Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
