GB/T 29190-2012
Measurement methods of drift rate of scanning probe microscope (English Version)

Standard No.

GB/T 29190-2012

Language

Chinese, Available in English version

Release Date

2012

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Latest

GB/T 29190-2012

Scope

This standard specifies the terms and definitions of SPM drift rate, abbreviations, measurement steps, performance parameter specifications, and the fundamental wave method of drift rate measurement based on SPM scanning images. This standard is applicable to drift rate measurement from 0.01nm/s to 10nm/s. The drift measurement in this standard is not applicable to image correction.

GB/T 29190-2012 Referenced Document

• GB/T 15000.3 Standard sample working guidelines part 3: Standard sample determination and homogeneity and stability evaluation*， 2023-05-23 Update
• ISO 18115 Surface chemical analysis - Vocabulary; Amndment 2
• JJF 1001 General Terms in Metrology and Their Definitions
• JJF 1059 Evaluation and Expression of Uncertainty in Measurement

GB/T 29190-2012 history

• 2012 GB/T 29190-2012 Measurement methods of drift rate of scanning probe microscope