LST EN 62047-8-2011 Semiconductor devices - Micro-electromechanical devices -- Part 8: Strip bending test method for tensile property measurement of thin films (IEC 62047-8:2011)
2011LST EN 62047-8-2011 Semiconductor devices - Micro-electromechanical devices -- Part 8: Strip bending test method for tensile property measurement of thin films (IEC 62047-8:2011)