ISO 14644-9:2012
Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration

Standard No.

ISO 14644-9:2012

Release Date

2012

Published By

International Organization for Standardization (ISO)

Status

Be replaced

Replace By

ISO 14644-9:2022

Latest

ISO 14644-9:2022

ISO 14644-9:2012 history

• 2022 ISO 14644-9:2022 Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration
• 2012 ISO 14644-9:2012 Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration