NF C96-050-12*NF EN 62047-12:2012
Semiconductor devices - Micro-electromechanical devices - Part 12 : bending fatigue testing method of thin film materials using resonant vibration of MEMS structures.

Standard No.

NF C96-050-12*NF EN 62047-12:2012

Release Date

2012

Published By

Association Francaise de Normalisation

Status

Withdraw

Latest

NF C96-050-12*NF EN 62047-12:2012

Replace By

LST EN 62220-1-1-2015

NF C96-050-12*NF EN 62047-12:2012 history

• 2012 NF C96-050-12*NF EN 62047-12:2012 Semiconductor devices - Micro-electromechanical devices - Part 12 : bending fatigue testing method of thin film materials using resonant vibration of MEMS structures.

NF C96-050-12*NF EN 62047-12:2012 Semiconductor devices - Micro-electromechanical devices - Part 12 : bending fatigue testing method of thin film materials using resonant vibration of MEMS structures. was changed to LST EN 62220-1-1-2015 Medical electrical equipment - Characteristics of digital x-ray imaging devices - Part 1-1: Determination of the detective quantum efficiency - Detectors used in radiographic imaging (IEC 62220-1-1:2015).