ASTM F1394-92(2012)
Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves

Standard No.
ASTM F1394-92(2012)
Release Date
1992
Published By
American Society for Testing and Materials (ASTM)
Status
Replace By
ASTM F1394-92(2020)
Latest
ASTM F1394-92(2020)
Scope
1.1 This test method covers gas distribution system components intended for installation into a high-purity gas distribution system.

1.1.1 This test method describes a procedure designed to draw statistically significant comparisons of particulate generation performance of valves tested under aggressive conditions.

1.1.2 This test method is not intended as a methodology for monitoring on-going particle performance once a particular valve has been tested.

1.2 This test method utilizes a condensation nucleus counter (CNC) applied to in-line gas valves typically used in semiconductor applications. It applies to automatic and manual valves of various types (such as diaphragms or bellows), 6.3 through 12.7-mm (1/4 through 1/2-in.) size. For applications of this test method to larger valves, see the table in the appendix.

1.2.1 Valves larger than 12.7 mm (1/2 in.) can be tested by this methodology. The test stand must be sized accordingly. Components larger than 12.7 mm (1/2 in.) should be tested while maintaining a Reynolds number of 208201;000 to 218201;000. This is the Reynolds number for 12.7-mm (1/2-in.) components tested at a velocity of 30.5 m/s (100 ft/s).

1.3 Limitations:

1.3.1 This test method is applicable to total particle count greater than the minimum detection limit (MDL) of the condensation nucleus particle counter and doe......

ASTM F1394-92(2012) history

  • 2020 ASTM F1394-92(2020) Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves
  • 1992 ASTM F1394-92(2012) Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves
  • 1992 ASTM F1394-92(2005) Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves
  • 1992 ASTM F1394-92(1999) Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves
Standard Test Method for Determination of Particle Contribution from Gas Distribution System Valves


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