This standard gives guidelines for the design of actuators for microphones equipped with electrically conductive diaphragms, gives methods for the validation of electrostatic actuators and gives a method for determining the electrostatic actuator response of a microphone.
DS/EN 61094-6:2005 history
2005DS/EN 61094-6:2005 Measurement microphones - Part 6: Electrostatic actuators for determination of frequency response