The guideline contains the classification of air cleanliness for cleanrooms and associated controlled environments in mathematical, tabular and graphical form. The guideline covers exclusively the maximum concentration of airborne particles at the clean work place. Following the classification according to DIN EN ISO 14644, only particles within the specified size range 0,1 ?m and 5 ?m are considered. This guideline cannot be used to characterize the physical, chemical, radiological, or viable nature of airborne particles.
VDI 2083 Blatt 1-2005 Referenced Document
DIN EN ISO 14644-1:1999 Cleanroom and associated controlled environments - Part 1: Classification of air cleanliness (ISO 14644-1:1999); German version EN ISO 14644-1:1999
DIN EN ISO 14644-2:2001 Cleanrooms and associated controlled environments - Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1 (ISO 14644-2:2000); German version EN ISO 14644-2:2000
DIN EN ISO 14644-4:2003 Cleanrooms and associated controlled environments - Part 4: Design, construction and start up (ISO 14644-4:2001); German version EN ISO 14644-4:2001