VDI 2083 Blatt 9.1-2006
Clean room technology - Compatibility with required cleanliness and surface cleanliness

Standard No.

VDI 2083 Blatt 9.1-2006

Release Date

2006

Published By

Association of German Mechanical Engineers

Status

Be replaced

Replace By

VDI 2083 BLATT 9.1-2021

Latest

VDI 2083 BLATT 9.1-2021

Replace

VDI 2083 Blatt 4-1996 VDI 2083 Blatt 8-2002 VDI 2083 Blatt 9.1-2005

Scope

This VDI guideline essentially deals with particulate contamination. Chemical (molecular), biological and radiological surface contamination is not a specific issue in this guideline; the same holds true for process media. This guideline provides definitions of the terms compatibility with the required cleanliness and cleanroom compatibility and, based on these definitions, the lassification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (see Figure 3). Furthermore, it describes the outgassing and electrostatic characteristics of equipment and air-handling components associated with controlled environments. Surface cleanliness and its classification are also within the scope of this guideline. The compatibility of a piece of equipment with the required cleanliness includes all contaminations relevant to the process. The measuring techniques described in this guideline, serving to assess the compatibility of equipment with the required cleanliness comprise cleanroom compatibility, surface particulate cleanliness, outgassing behaviour.

VDI 2083 Blatt 9.1-2006 Referenced Document

• DIN 50452-1:1995 Testing of materials for semiconductor technology - Test method for particle analysis in liquids - Part 1: Microscopic determination of particles
• DIN 53804-2:1985 Stastistical interpretation of data; countable (discrete) characteristics
• DIN 55301:1978 Presentation of statistical tables
• DIN EN 1081:1998 Resilient floor coverings - Determination of the electrical resistance; German version EN 1081:1998
• DIN EN 1335-1 Berichtigung 1:2002 Office furniture - Office work chair - Part 1: Dimensions - Determination of dimensions
• DIN EN 1335-1:2002 Office furniture - Office work chair - Part 1: Dimensions; Determination of dimensions; German version EN 1335-1:2000
• DIN EN 1335-2:2002 Office furniture – Office work chair – Part 2: Safety requirements
• DIN EN 1335-3:2002 Office furniture – Office work chair – Part 3: Safety test methods
• DIN EN 13779:2005 Ventilation of non-residential buildings – general principles and requirements for ventilation and air conditioning systems
• DIN EN ISO 4287:1998 Geometrical Product Specifications (GPS) – Surface texture: Profile method – Terms, definitions and surface texture parameters
• DIN EN ISO 8785 Geometrical Product Specifications (GPS) - Surface imperfections - Terms, definitions and parameters (ISO 8785:1998); German version EN ISO 8785:1999

VDI 2083 Blatt 9.1-2006 history

• 2021 VDI 2083 BLATT 9.1-2021 Clean room technology - suitability for cleanliness and surface cleanliness
• 2006 VDI 2083 Blatt 9.1-2006 Clean room technology - Compatibility with required cleanliness and surface cleanliness
• 2005 VDI 2083 Blatt 9.1-2005 Reinraumtechnik - Reinheitstauglichkeit und Oberflaechenreinheit
• 2002 VDI 2083 Blatt 8-2002 Cleanroom technology - Cleanroom suitability of operating materials
• 1996 VDI 2083 Blatt 4-1996 Reinraumtechnik - Oberflaechenreinheit

VDI 2083 Blatt 9.1-2006 Clean room technology - Compatibility with required cleanliness and surface cleanliness has been changed from VDI 2083 Blatt 4-1996 Reinraumtechnik - Oberflaechenreinheit.

VDI 2083 Blatt 9.1-2006 Clean room technology - Compatibility with required cleanliness and surface cleanliness has been changed from VDI 2083 Blatt 8-2002 Cleanroom technology - Cleanroom suitability of operating materials.