ASTM F1367-98(2011)
Standard Specification for Chromium Sputtering Targets for Thin Film Applications

Standard No.

ASTM F1367-98(2011)

Release Date

1998

Published By

American Society for Testing and Materials (ASTM)

Latest

ASTM F1367-98(2011)

Scope

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

ASTM F1367-98(2011) Referenced Document

• ASTM E112 Standard Test Methods for Determining Average Grain Size

ASTM F1367-98(2011) history

• 1998 ASTM F1367-98(2011) Standard Specification for Chromium Sputtering Targets for Thin Film Applications
• 1998 ASTM F1367-98(2003) Standard Specification for Chromium Sputtering Targets for Thin Film Applications
• 1998 ASTM F1367-98 Standard Specification for Chromium Sputtering Targets for Thin Film Applications