GOST R 8.659-2009
State system for ensuring the uniformity of measurements Instruments measuring the characteristics of ultraviolet radiation of technological testing of nanophotolitography.Verification procedure

Standard No.

GOST R 8.659-2009

Release Date

2009

Published By

RU-GOST R

Latest

GOST R 8.659-2009

GOST R 8.659-2009 Referenced Document

• GOST 8.197-2005 State system for ensuring the uniformity of measurements. State verification scheme for instruments measuring of the spectral radiance in spectral range from 0,04 to 0,25 ?
• GOST 8.207-1976 State system for ensuring the uniformity of measurements. Direct measurements with multiple observations. Methods of processing the results of observations. Basic principles
• GOST 8.552-2001 State system for ensuring the uniformity of measurements. State verification scheme for instruments measuring the radiant flux and irradiance in spectral range from 0.03 to 0.40 mcm

GOST R 8.659-2009 history

• 2009 GOST R 8.659-2009 State system for ensuring the uniformity of measurements Instruments measuring the characteristics of ultraviolet radiation of technological testing of nanophotolitography.Verification procedure