GOST R 8.592-2009
State system for ensuring the uniformity of measurements. Single-crystal silicon nanometer range relief measure. Geometrical shapes, linear size and manufacturing material requirements

Standard No.

GOST R 8.592-2009

Release Date

2009

Published By

RU-GOST R

Latest

GOST R 8.592-2009

GOST R 8.592-2009 Referenced Document

• GOST 19658-1981 Monocrystalline silicon in ingots. Specifications
• GOST 8.591-2009 State system for ensuring the uniformity of measurements. Nanometer range relief measure with trapezoidal profile of elements. Verification method
• GOST 8.593-2009 State system for ensuring the uniformity of measurements. Atomic-force scanning probe microscopes. Method for verification
• GOST 8.594-2009 State system for ensuring the uniformity of measurements. Scanning electron microscopes. Method for verification

GOST R 8.592-2009 history

• 2009 GOST R 8.592-2009 State system for ensuring the uniformity of measurements. Single-crystal silicon nanometer range relief measure. Geometrical shapes, linear size and manufacturing material requirements
• 2002 GOST R 8.592-2002 State system for ensuring the uniformity of measurements. Thermal energy, received by users in water heat supply system. Typical procedure of measurements