This Technical Specification describes a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.
This method is applicable to oxide films 1 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn and Al. Other elements that can be determined by the method are O, C, N, H, P and S.
ISO/TS 25138:2010 Referenced Document
ISO 14284 Steel and iron — Sampling and preparation of samples for the determination of chemical composition*， 2022-10-25 Update
ISO 14707 Surface chemical analysis - Glow discharge optical emission spectrometry (GD-OES) - Introduction to use*， 2021-02-28 Update
ISO 16962:2005 Surface chemical analysis - Analysis of zinc- and/or aluminium-based metallic coatings by glow-discharge optical-emission spectrometry
ISO/TS 25138:2010 history
2019ISO/TS 25138:2019 Surface chemical analysis — Analysis of metal oxide films by glow-discharge optical-emission spectrometry
2010ISO/TS 25138:2010 Surface chemical analysis - Analysis of metal oxide films by glow-discharge optical-emission spectrometry