This International Standard specifies the method for axial tensile–tensile force fatigue testing
of thin film materials with a length and width under 1 mm and a thickness in the range
between 0,1 μm and 10 μm under constant force range or constant displacement range. Thin
films are used as main structural materials for MEMS and micromachines.
The main structural materials for MEMS, micromachines, etc., have special features, such as
typical dimensions of a few microns, material fabrication by deposition, and test piece
fabrication by means of non-mechanical machining, including photolithography. This
International Standard specifies the axial force fatigue testing methods for micro-sized smooth
specimens, which enables a guarantee of accuracy corresponding to the special features. The
tests are carried out at room temperatures, in air, with loading applied to the test piece along
the longitudinal axis.
BS EN 62047-6:2010 history
2010BS EN 62047-6:2010 Semiconductor devices - Micro-electromechanical devices - Axial fatigue testing methods of thin film materials