GB/T 24468-2009
Specification for definition and measurement of semiconductor equipment reliability,availability and maintainability(RAM) (English Version)
- Standard No.
- GB/T 24468-2009
- Language
- Chinese, Available in English version
- Release Date
- 2009
- Published By
- General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
- Latest
- GB/T 24468-2009
- Scope
- This standard establishes a common basis for communication between users and equipment suppliers of semiconductor manufacturing equipment (hereinafter referred to as equipment) by providing measurement criteria for the reliability, availability and maintainability (hereinafter referred to as RAM) performance of semiconductor manufacturing equipment (hereinafter referred to as equipment) in a manufacturing environment . This standard defines six basic states of equipment, and all equipment conditions and stages must be classified into these six states. The state of a device is determined by a function, regardless of who performs the function. The measurements of equipment reliability referred to in this specification focus primarily on the relationship between equipment failure and equipment usage, rather than the relationship between equipment failure and the total (calendar) time experienced by the equipment. Chapter 5 (Status of the device) of this standard defines how the time of the device is classified, and Chapter 6 (RAM measurement) defines the formula for measuring the performance of the device. Chapter 7 (Measurement of Uncertainty) gives a statistical method for evaluating calculated performance quantities. Effective implementation of this standard requires that the (RAM) performance of the device can be tracked through the device's runtime and cycles. Automatic tracking of equipment status is outside the scope of this standard, which is covered by SEMI E58. Clear and effective communication between users and suppliers can promote continuous improvement of equipment performance. The RAM indicators in this standard can be directly applied to non-clustered equipment at the level of the entire equipment and subsystems, and can also be used at the level of subsystems (such as process modules) for multi-channel clustered equipment.
GB/T 24468-2009 Referenced Document
- SEMI E35 GUIDE TO CALCULATE COST OF OWNERSHIP (COO) METRICS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
- SEMI E79 SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT PRODUCTIVITY
GB/T 24468-2009 history
- 2009 GB/T 24468-2009 Specification for definition and measurement of semiconductor equipment reliability,availability and maintainability(RAM)
