AS ISO 14237:2006
Surface chemical analysis - Secondary-ion mass spectrometry - Determination of boron atomic concentration in silicon using uniformly doped materials

Standard No.

AS ISO 14237:2006

Published By

Standard Association of Australia （SAA）

Latest

AS ISO 14237:2006

Scope

Adopts ISO 14237:2000 to specify a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon, using uniformly doped materials calibrated by a certified reference material implanted with boron.

AS ISO 14237:2006 history

• 1970 AS ISO 14237:2006 Surface chemical analysis - Secondary-ion mass spectrometry - Determination of boron atomic concentration in silicon using uniformly doped materials