This calibration system table is suitable for the value transfer of vacuum measuring instruments within the pressure range of (1×10~1×10) Pa. It includes vacuum measuring reference instruments, vacuum measuring standard instruments, vacuum working measuring instruments, and the quantities in between. Value transfer relationships and value transfer methods.
JJG 2022-2009 history
2009JJG 2022-2009 Verification Regulation of Vacuum Measuring Instruments
1989JJG 2022-1989 Verification Scheme of Measuring Instruments for Vacuum