DIN 50455-1:2009
Testing of materials for semiconductor technology - Methods for characterizing photoresists - Part 1: Determination of coating thickness with optical methods
- Standard No.
- DIN 50455-1:2009
- Release Date
- 2009
- Published By
- German Institute for Standardization
- Status
- Replace By
- DIN 50455-1:2009-10
- Latest
- DIN 50455-1:2009-10
- Replace
- DIN 50455-1:2008 DIN 50455-1:1991
DIN 50455-1:2009 Referenced Document
- EN ISO 14644-1 Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015)*， 2015-12-01 Update
DIN 50455-1:2009 history
- 2009 DIN 50455-1:2009-10 Testing of materials for semiconductor technology - Methods for characterizing photoresists - Part 1: Determination of coating thickness with optical methods
- 2009 DIN 50455-1:2009 Testing of materials for semiconductor technology - Methods for characterizing photoresists - Part 1: Determination of coating thickness with optical methods
- 1991 DIN 50455-1:1991 Testing of materials for semiconductor technology; methods for characterizing photoresists; determination of coating thickness with optical methods
