This standard specifies the gold target requirements, test methods, inspection rules and signs, packaging, transportation, storage and purchase order (or contract) content. This standard applies to all kinds of gold sputtering targets (hereinafter referred to as gold targets) used in the manufacture of semiconductor electronic devices.
GB/T 23611-2009 Referenced Document
GB/T 11066.5 Methods for chemical analysis of gold.Determination of silver, copper, iron, lead , antimony and bismuth contents.Atomic emission spectrometry
GB/T 15077 Geometric size measuring methods of precious metals and their alloy materials