GB/T 23611-2009
Gold target (English Version)

Standard No.
GB/T 23611-2009
Language
Chinese, Available in English version
Release Date
2009
Published By
General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China
Status
 2024-03
Replace By
GB/T 23611-2023
Latest
GB/T 23611-2023
Scope
This standard specifies the gold target requirements, test methods, inspection rules and signs, packaging, transportation, storage and purchase order (or contract) content. This standard applies to all kinds of gold sputtering targets (hereinafter referred to as gold targets) used in the manufacture of semiconductor electronic devices.

GB/T 23611-2009 Referenced Document

  • GB/T 11066.5 Methods for chemical analysis of gold.Determination of silver, copper, iron, lead , antimony and bismuth contents.Atomic emission spectrometry
  • GB/T 15077 Geometric size measuring methods of precious metals and their alloy materials
  • GB/T 4134 Gold ingots*2021-08-20 Update

GB/T 23611-2009 history

Gold target



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