IEC 62047-6:2009
Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials
- Standard No.
- IEC 62047-6:2009
- Release Date
- 2009
- Published By
- International Electrotechnical Commission (IEC)
- Latest
- IEC 62047-6:2009
- Replace
- IEC 47F/15/FDIS:2009
IEC 62047-6:2009 history
- 2009 IEC 62047-6:2009 Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials
