This Standard specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and cleanzones.
JIS B 9917-3:2009 Referenced Document
ISO 14644-2:2000 Cleanrooms and associated controlled environments - Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
JIS B 9920:2002 Classification of air cleanliness for cleanrooms
JIS B 9921 Light scattering airborne particle counter for clean spaces*， 2010-05-20 Update