ASTM E673-02b
Standard Terminology Relating to Surface Analysis

Standard No.

ASTM E673-02b

Release Date

2002

Published By

American Society for Testing and Materials (ASTM)

Status

Be replaced

Replace By

ASTM E673-03

Latest

ASTM E673-03

Scope

1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).

ASTM E673-02b history

• 2003 ASTM E673-03 Standard Terminology Relating to Surface Analysis
• 2002 ASTM E673-02b Standard Terminology Relating to Surface Analysis
• 2002 ASTM E673-02a Standard Terminology Relating to Surface Analysis
• 2002 ASTM E673-02 Standard Terminology Relating to Surface Analysis
• 2001 ASTM E673-01 Standard Terminology Relating to Surface Analysis
• 1998 ASTM E673-98E1 Standard Terminology Relating to Surface Analysis