ASTM E1577-04
Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis

Standard No.

ASTM E1577-04

Release Date

2004

Published By

American Society for Testing and Materials (ASTM)

Status

Be replaced

Replace By

ASTM E1577-11

Latest

ASTM E1577-11

Scope

Ion beams are utilized in surface analysis in two ways. First, they can generate signals from the specimen, for example, in SIMS and ISS. Second, they can remove material from the specimen surface while a surface analytical technique determines the composition of the freshly exposed surface. This process is called sputter depth profiling. Ideally, this guide requires reporting all characteristics of the ion beam that can possibly affect the results so that the measurement can be reproduced.

1.1 This guide covers the information needed to characterize ion beams used in surface analysis.

1.2 This guide does not cover all information required to perform a sputter depth profile (see referenced documents), specify any properties of the specimen except its surface normal, and discuss the rationale for choosing a particular set of ion beam parameters (1,7). This guide does assume that the ion flux has a unique direction, that is, is an ion beam, rather than a wide spectrum of velocity vectors more typical of a plasma.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

ASTM E1577-04 Referenced Document

• ASTM E1127 Standard Guide for Depth Profiling in Auger Electron Spectroscopy
• ASTM E1162 Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS)
• ASTM E673 Standard Terminology Relating to Surface Analysis
• ASTM E684 Standard Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces
• ASTM E996 Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

ASTM E1577-04 history

• 2011 ASTM E1577-11 Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis
• 2004 ASTM E1577-04 Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis
• 1995 ASTM E1577-95(2000) Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis