JIS B 9917-5:2008
Maintenance and cleaning in cleanroom operations
- Standard No.
- JIS B 9917-5:2008
- Release Date
- 2008
- Published By
- Japanese Industrial Standards Committee (JISC)
- Latest
- JIS B 9917-5:2008
- Scope
- This standard specifies the basic requirements related to control and cleaning in cleanroom operations.
JIS B 9917-5:2008 Referenced Document
- ISO 14644-2:2000 Cleanrooms and associated controlled environments - Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
- JIS Z 8122 Contamination control -- Terminology
JIS B 9917-5:2008 history
- 2008 JIS B 9917-5:2008 Maintenance and cleaning in cleanroom operations
