BS ISO 20341:2003
Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials

Standard No.

BS ISO 20341:2003

Release Date

2003

Published By

British Standards Institution (BSI)

Status

Be replaced

Replace By

BS ISO 20341:2003(2010)

Latest

BS ISO 20341:2003(2010)

Replace

02/122923 DC:2002

Scope

1 This International Standard specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. 2 This International Standard is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.

BS ISO 20341:2003 history

• 0000 BS ISO 20341:2003(2010)
• 2003 BS ISO 20341:2003 Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials