ANSI/IEST/ISO 14644-6:2008
Cleanrooms and associated controlled environments - Part 6: Vocabulary

Standard No.

ANSI/IEST/ISO 14644-6:2008

Release Date

2008

Published By

American National Standards Institute （ANSI)

Latest

ANSI/IEST/ISO 14644-6:2008

Scope

This part of ISO 14644 established a vocabulary of terms and definitions related to cleanrooms and associated controlled environments. This part of ISO 14644 is a compendium of the terms and definitions given in the other parts of ISO 14644. It also includes the terms and definitions given in ISO 14698-1 and ISO 14698-2.

ANSI/IEST/ISO 14644-6:2008 history

• 2008 ANSI/IEST/ISO 14644-6:2008 Cleanrooms and associated controlled environments - Part 6: Vocabulary