This International Standard defines terms used in the practices of electron probe microanalysis (EPMA). It covers both general and specific concepts classified according to their hierarchy in a systematic order.
This International Standard is applicable to all standardization documents relevant to the practices of EPMA. In addition, some parts of this International Standard are applicable to those documents relevant to the practices of related fields (e.g. SEM, AEM, EDX) for definition of those terms common to them.